Linear Gratings – period:>100nm, height:100nm; Holes on Square Lattice – period:>100nm, height:100nm; Hexagonal pillar array – Period(Gap+Diameter): 230μm, Diameter: 200μm, Height: 30μm; Pillars on Square Lattice – period:>100nm, height:100nm. Can the Desktop R2P NanoImprinter reach the requirement?
Tests and trials are always recommended to find the right parameters and materials.